Wafer Thickness Measurement - TTV,LTV,BOW,Warp...

                               [Optical Wafer Thickness MicroGauge]

FIBERPRO released Optical Wafer Thickness MicroGauge(IFP-801) which is of great

use in measurement of Thickness, TTV, Warp and Bow of various glass, transparent,

light-reflected materials. It can be designed under In-line/Off-line measurement condition with motion stage controller in various applications. There's no physical damage on the samples during measurement, and it can be protected from dust or pollutant by having a cover.

  1. Features

       - Non-contact

       - High accuracy and repeatability       

       - Ultra-fast measurement speed                         

       - No Calibration needed

       - Full surface scanning

                                                                                                        [IFP-801: For 8~12 inch Wafer]                                                                    

  2. Main Application                            

      -Wafer/Glass/Quartz/SiO2/GaAS                       

       - Etch/Grinder Process Control

       - Metrology Industries

       - Wafer Thinning Process

       - Stress/TTV/Thickness/Warp/Bow Measurement & Analysis

                                                                                                                                                                                                                          

 3. Specification                                                                               [IFP-801S: For 2~6 inch Wafer ]

            

       - Accuracy:0.1um                                                                        

       - Measurement  Range: 50um~2,000um

       - Remote Interface: LAN

       - Dimension(WxDxH)

          : 550x620x291 mm /380x380x370mm

        -Weight: 70kg/24kg

                                                                                                                             

                                                                                              [Thickness measurement data of IFP-801]

4. Homepage: (http://www.fiberpro.com/)

       

http://www.fiberpro.com/menu/?Mn=products&sMn=1&kind=product&kind1=PSSolution&mod=Gview&idx=51 

5. Contact Point

       Mr. Lee, Jong-Bo (042-360-0036~7, jblee@fiberpro.com, mjlee@fiberpro.com)

IFP-801,IFP-801S